(AlCrMoNiTi)N<sub>x</sub>和（AlCrMoZrTi）N<sub>x</sub>薄膜的摩擦特性

任波; 郭鹏; 赵瑞锋; 王新莉; 李刚; 张红松; 关绍康

doi:10.15980/j.tzzz.2014.04.007

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(AlCrMoNiTi)N_x和（AlCrMoZrTi）N_x薄膜的摩擦特性
Frictional Behavior of（AlCrMoNiTi）N_x and （AlCrMoZrTi）N_x Films
2014年34卷第4期页码：337-341
纸质出版日期： 2014 ，
DOI： 10.15980/j.tzzz.2014.04.007

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[1]任波,郭鹏,赵瑞锋,王新莉,李刚,张红松,关绍康.(AlCrMoNiTi)N_x和(AlCrMoZrTi)N_x薄膜的摩擦特性[J].特种铸造及有色合金,2014,34(04):337-341.

Ren Bo, Guo Peng, Zhao Ruifeng, et al. Frictional Behavior of（AlCrMoNiTi）N_x and （AlCrMoZrTi）N_x Films[J]. Special Casting & Nonferrous Alloys, 2014,34(4):337-341.
[1]任波,郭鹏,赵瑞锋,王新莉,李刚,张红松,关绍康.(AlCrMoNiTi)N_x和(AlCrMoZrTi)N_x薄膜的摩擦特性[J].特种铸造及有色合金,2014,34(04):337-341. DOI： 10.15980/j.tzzz.2014.04.007.

Ren Bo, Guo Peng, Zhao Ruifeng, et al. Frictional Behavior of（AlCrMoNiTi）N_x and （AlCrMoZrTi）N_x Films[J]. Special Casting & Nonferrous Alloys, 2014,34(4):337-341. DOI： 10.15980/j.tzzz.2014.04.007.

摘要

采用射频磁控溅射技术在S304不锈钢和纯Cu基体上成功制备出了（AlCrMoNiTi）Nx和（AlCrMoZrTi）Nx高熵合金氮化物薄膜

采用微磨损试验机对两种薄膜的摩擦特性进行了研究。结果表明

（AlCrMoZrTi）Nx薄膜在S304不锈钢和纯Cu衬底上的最小摩擦因数分别为0.182和0.127

最高耐磨寿命为1 200s。在两种衬底上

（AlCrMoZrTi）Nx薄膜的摩擦性能均优于（AlCrMoNiTi）Nx薄膜

其原因主要在于薄膜中Zr的固溶强化效果高于Ni

因而薄膜的摩擦性能得到增强。两种薄膜在S304不锈钢和Cu衬底上的磨损机制主要为磨粒磨损。

Abstract

The（AlCrMoNiTi）Nxand（AlCrMoZrTi）Nxhigh entropy alloy nitride films were fabricated successfully by radio frequency（RF）magnetron sputtering on the S304stainless steel and on Cu substrates

respectively.The frictional behavior of the film prepared was examined on a Micro-Tribotester. The experimental results show that the（AlCrMoZrTi）Nxfilms have the minimum friction coefficient of 0.182and 0.127on the S304stainless steel and on Cu substrates

respectively and the maximum wear life of 1200s.On both substrates

the frictional behavior of（AlCrMoZrTi）Nxfilms are superior to that of（AlCrMoNiTi）Nxfilms

which is attributed to solid-solution strengthening effect of Zr element superior to that of Ni.The frictional mechanism of the two kinds of films is characterized by abrasive wear on the substrates of S304stainless and on Cu.