表面化学处理对铸造多晶硅棒表面形貌及切割性能的影响

李飞龙; 李煜燚; 顾永军; 李丽华; 黄金亮; 熊震

doi:10.15980/j.tzzz.2020.06.006

实用研究 | 浏览量 : 0 下载量: 26 CSCD: 0

导出
分享
收藏
专辑

表面化学处理对铸造多晶硅棒表面形貌及切割性能的影响
Surface Chemical Treatment of Cast Multicrystalline Silicon Rods and Its Effect on Slicing Performance
2020年40卷第6期页码：604-606
纸质出版日期： 2020 ，
DOI： 10.15980/j.tzzz.2020.06.006

扫描看全文

[1]李飞龙,李煜燚,顾永军,李丽华,黄金亮,熊震.表面化学处理对铸造多晶硅棒表面形貌及切割性能的影响[J].特种铸造及有色合金,2020,40(06):604-606.

Li Feilong, Li Yuyi, Gu Yongjun, et al. Surface Chemical Treatment of Cast Multicrystalline Silicon Rods and Its Effect on Slicing Performance[J]. Special Casting & Nonferrous Alloys, 2020,40(6):604-606.
[1]李飞龙,李煜燚,顾永军,李丽华,黄金亮,熊震.表面化学处理对铸造多晶硅棒表面形貌及切割性能的影响[J].特种铸造及有色合金,2020,40(06):604-606. DOI： 10.15980/j.tzzz.2020.06.006.

Li Feilong, Li Yuyi, Gu Yongjun, et al. Surface Chemical Treatment of Cast Multicrystalline Silicon Rods and Its Effect on Slicing Performance[J]. Special Casting & Nonferrous Alloys, 2020,40(6):604-606. DOI： 10.15980/j.tzzz.2020.06.006.

摘要

使用KOH溶液对铸造多晶硅硅棒表面进行腐蚀

并用H

溶液进行氧化处理

研究了温度和KOH溶液浓度对硅棒的腐蚀程度以及不同温度的30%的H

溶液对腐蚀后的硅棒的氧化效果

并对其切割性能进行了研究。结果表明

硅棒在65℃、质量浓度为20%的KOH溶液中腐蚀2min后效果最好;腐蚀后的硅棒在55℃的30%的H

溶液中浸泡8min后的表面氧化程度最高。使用腐蚀和氧化效果最好的溶液配比处理硅棒

在使用金刚线切片机切割后硅棒崩边比例下降了87%。

Abstract

The cast polysilicon silicon rods were corroded with KOH solutions and oxidized with H

solutions.The effects of KOH solution concentrations and silicon temperatures on the corrosion of the silicon rods were investigated.The effect of the temperature of 30% H

solution on the oxidization of the as-corroded silicon rods was also investigated.The cutting performance of the as-fabricated silicon rods was analyzed.The optimal etched silicon rods were obtained after the corrosion with 20% KOH solution for 2 min at 65 ℃.The highest oxidation degree was obtained by soaking the silicon rod in 30% H

solution at 55℃for 8 min.The ratio of edge chipping of the polycrystalline silicon is decreased by 87% fabricated with diamond wire slicers using the optimal corrosion and oxidation treatment.