β-Si<sub>3</sub>N<sub>4</sub>涂层辅助定向生长高效多晶硅的研究

糜长成; 蔡延焕; 周兵; 董慧; 戚凤鸣; 黄新明

doi:10.15980/j.tzzz.2019.08.003

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β-Si₃N₄涂层辅助定向生长高效多晶硅的研究
β-Si₃N₄-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification
2019年39卷第8期页码：823-827
纸质出版日期： 2019 ，
DOI： 10.15980/j.tzzz.2019.08.003

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[1]糜长成,蔡延焕,周兵,董慧,戚凤鸣,黄新明.β-Si_3N_4涂层辅助定向生长高效多晶硅的研究[J].特种铸造及有色合金,2019,39(08):823-827.

Mi Changcheng, Cai Yanhuan, Zhou Bing, et al. β-Si₃N₄-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification[J]. Special Casting & Nonferrous Alloys, 2019,39(8):823-827.
[1]糜长成,蔡延焕,周兵,董慧,戚凤鸣,黄新明.β-Si_3N_4涂层辅助定向生长高效多晶硅的研究[J].特种铸造及有色合金,2019,39(08):823-827. DOI： 10.15980/j.tzzz.2019.08.003.

Mi Changcheng, Cai Yanhuan, Zhou Bing, et al. β-Si₃N₄-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification[J]. Special Casting & Nonferrous Alloys, 2019,39(8):823-827. DOI： 10.15980/j.tzzz.2019.08.003.

摘要

是铸造多晶硅锭常用的脱模材料

颗粒状的α相与棒状的β相是Si

涂层中常见的两种生成相。石英坩埚底部铺设的Si

涂层严重影响着晶体品质。采用α

β两种不同主导相的Si

制作涂层。结果表明

β相主导的Si

涂层

可以提高脱模和引晶效果

降低硅锭底部红区高度。

Abstract

Silicon nitride is a commonly used releasing material for casting multi-crystalline silicon ingots.The granularα-phase and the rod-shaped β-phase are two generation phases commonly observed in silicon nitride coatings.The Si

coating on the bottom of the quartz crucible can greatly affect the quality of the Si crystal.Two kinds of coating were made of silicon nitride with two different dominant phases ofα

respectively.The results show that theβ-phase-dominated silicon nitride coating can improve the demolding and the seeding effect

as well as reducing the red zone height at the bottom of the ingot.

关键词

α-Si3N4β-Si3N4主导相引晶脱模

Keywords

α-Si3N4β-Si3N4Dominant PhaseSeedingDemolding

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β-Si3N4涂层辅助定向生长高效多晶硅的研究

β-Si3N4-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification

DOI： 10.15980/j.tzzz.2019.08.003

摘要

Abstract

关键词

Keywords

references

β-Si₃N₄涂层辅助定向生长高效多晶硅的研究

β-Si₃N₄-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification