CrCuFeMnSiAlx（x=0.75

1.0

1.5）high entropy alloys were produced by aluminothermic reaction on copper and glass substrates.The phase structure

microstructure and composition of the high entropy alloy were investigated by a combination of X-ray diffractometry

scanning electron microscopy and energy dispersive spectroscopy.The micro-hardness of HEAs also was tested.The effect of different substrates on the composition and structure and hardness of HEAs powder were analyzed.The results show that the CrCuFeMnSiAlxalloys can be prepared by aluminothermic reaction successfully.The alloys contain the primary BCC solid solution and a small amount of simple cubic structure.Compared with the alloys produced on copper substrate

the crystallinity of alloys prepared on glass is the better and the composition is more close to the equi-molar ratios.After crushing

the morphology of HEAs powder exhibits irregular polyhedron

and powder size is in range of several micrometers to several nanometers.The average particle size of HEAs powder prepared on glass substrate is the larger than that of one on copper substrate.The micro-hardness of HEAs prepared on glass substrate reaches the maximum value of 590 HV at Al

1.0

.