多晶硅铸锭用石英坩埚氮化硅涂层免烧结工艺研究

刘志凯; 戴斌煜; 张伟; 商景利

doi:10.15980/j.tzzz.2013.02.034

实用研究 | 浏览量 : 0 下载量: 410 CSCD: 1

导出
分享
收藏
专辑

多晶硅铸锭用石英坩埚氮化硅涂层免烧结工艺研究
Preparation of Si3N4Coating in Quartz Crucible Used for Multicrystalline Silicon Ingot by Non-sintered Process
2013年33卷第2期页码：116-118
纸质出版日期： 2013 ，
DOI： 10.15980/j.tzzz.2013.02.034

扫描看全文

[1]刘志凯,戴斌煜,张伟,商景利.多晶硅铸锭用石英坩埚氮化硅涂层免烧结工艺研究[J].特种铸造及有色合金,2013,33(02):116-118.

Liu Zhikai, Dai Binyu, Zhang Wei, et al. Preparation of Si3N4Coating in Quartz Crucible Used for Multicrystalline Silicon Ingot by Non-sintered Process[J]. Special Casting & Nonferrous Alloys, 2013,33(2):116-118.
[1]刘志凯,戴斌煜,张伟,商景利.多晶硅铸锭用石英坩埚氮化硅涂层免烧结工艺研究[J].特种铸造及有色合金,2013,33(02):116-118. DOI： 10.15980/j.tzzz.2013.02.034.

Liu Zhikai, Dai Binyu, Zhang Wei, et al. Preparation of Si3N4Coating in Quartz Crucible Used for Multicrystalline Silicon Ingot by Non-sintered Process[J]. Special Casting & Nonferrous Alloys, 2013,33(2):116-118. DOI： 10.15980/j.tzzz.2013.02.034.

摘要

研究了石英坩埚氮化硅涂层免烧结工艺。在氮化硅浆料中加入一定量固体和液体粘结剂

使氮化硅粉强有力地吸附在坩埚内壁

喷涂完成后在70～80℃保温2h直接装入硅料

免去了传统涂层制备工艺中坩埚需在1050℃温度下烧结6～7h的工艺过程。此工艺可缩短晶锭的生产周期

提高生产效率

降低生产成本。

Abstract

Preparation of Si3N4coating in quartz crucible was conducted by non-sintered process.By adding some solid and liquid binders in the Si3N4slurry

Si3N4powders were adhered strongly with the crucible inter-wall.By putting the silicon material into the crucible directly after spraying process and holding at 70～80℃for 2hours

the traditional process of crucible sintered at 1 050℃for 6～7hours in the sintering furnace can be eliminated

and so the production cycle can be shortened

improving efficiency and decreasing production cost.