La<sup>+</sup>,Mo<sup>+</sup>注入TC4合金表面粗糙度变化研究

卫中山; 王珉; 左敦稳; 李亮

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La⁺,Mo⁺注入TC4合金表面粗糙度变化研究
Change of Surface Roughness of TC4 Alloy Implanted by La⁺ ,Mo⁺
2003年第4期页码：1-3
纸质出版日期： 2003 ，
DOI：

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[1]卫中山,,,,,,,,,,王珉,,,,,,,,,,左敦稳,,,,,,,,,,李亮.La~+,Mo~+注入TC4合金表面粗糙度变化研究[J].特种铸造及有色合金,2003(04):1-3+67.

Wei Zhongshan Wang Min Zuo Dunwen Li Liang. Change of Surface Roughness of TC4 Alloy Implanted by La⁺ ,Mo⁺[J]. Special Casting & Nonferrous Alloys, 2003,(4):1-3.
[1]卫中山,,,,,,,,,,王珉,,,,,,,,,,左敦稳,,,,,,,,,,李亮.La~+,Mo~+注入TC4合金表面粗糙度变化研究[J].特种铸造及有色合金,2003(04):1-3+67. DOI：

Wei Zhongshan Wang Min Zuo Dunwen Li Liang. Change of Surface Roughness of TC4 Alloy Implanted by La⁺ ,Mo⁺[J]. Special Casting & Nonferrous Alloys, 2003,(4):1-3. DOI：

摘要

利用MEVVA离子注入技术对TC4合金进行了表面处理

测量了TC4合金经不同剂量的La+和Mo+注入后表面粗糙度的变化。结果表明

离子注入使表面粗糙度的高度特性参数值普遍下降

随着注入剂量增加

各参数值下降更明显

Mo+注入效果要略优于La+的效果。表面形貌得到优化。分析了离子注入对表面粗糙度的影响规律

并利用溅射理论给出了物理解释

Abstract

The surface treatment for TC4 alloy was conducted by ME VVA ion implantation method. The changes of surface roughness of TC4 alloy impla nted by varying La +

Mo + volume were measured. It is found that impl antation of the ion results in decreasing the values of height parameters of the surface roughness

and the more the implanted doses increase

the more the parameters decrease

and also the Mo + implantation effects slightly ex ceed La + . The surface morphology of the alloy was improved. The effective mecha nism of the ion implantation on the surface roughness was analyzed with the sput ter theory.