铝表面磁控溅射沉积不锈钢薄膜及其性能

黄晓辉; 左秀荣; 王齐伟; 李勇

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铝表面磁控溅射沉积不锈钢薄膜及其性能
Growth and Mechanical Properties of Stainless Steel Thin Films Prepared by DC Magnetron Sputtering on Al Alloy Foil
2009年29卷第8期页码：770-773
纸质出版日期： 2009 ，
DOI：

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[1]黄晓辉,左秀荣,王齐伟,李勇.铝表面磁控溅射沉积不锈钢薄膜及其性能[J].特种铸造及有色合金,2009,29(08):770-773+686.

Huang Xiaohui, Zuo Xiurong, Wang Qiwei, et al. Growth and Mechanical Properties of Stainless Steel Thin Films Prepared by DC Magnetron Sputtering on Al Alloy Foil[J]. Special Casting & Nonferrous Alloys, 2009,29(8):770-773.
[1]黄晓辉,左秀荣,王齐伟,李勇.铝表面磁控溅射沉积不锈钢薄膜及其性能[J].特种铸造及有色合金,2009,29(08):770-773+686. DOI：

Huang Xiaohui, Zuo Xiurong, Wang Qiwei, et al. Growth and Mechanical Properties of Stainless Steel Thin Films Prepared by DC Magnetron Sputtering on Al Alloy Foil[J]. Special Casting & Nonferrous Alloys, 2009,29(8):770-773. DOI：

摘要

在铝箔表面采用直流反应磁控溅射方法进行溅射试验

在铝箔表面沉积出不锈钢薄膜。采用磨损试验、盐雾试验、显微硬度试验和薄膜厚度测试等方法对试样进行检测

用扫描电镜和金相显微镜对试样表面形貌观察分析。试验结果表明

溅射功率选择在300W时

在铝箔表面沉积不锈钢薄膜

铝箔表面耐磨性增大

硬度增大

沉积的不锈钢薄膜晶粒尺寸细小、均匀致密

表面呈金属光泽

薄膜与基体结合良好

并具有一定的耐蚀性能。

Abstract

Stainless steel thin film on the aluminum alloy foils was deposited by DC （direct current） magnetron sputtering to improve the defects of inhomogeneous structure

low clearness and low hardness. The samples were tested by frictional testing and salt spray testing

micro-hardness testing and thin film thickness testing

and the sample surface morphology was observed by SEM （scanning electron microscope） and OM （optical microscope）. The results reveal that with sputtering power of 300W

deposited stainless steel thin film with uniformly compact fine grain exhibits desirable brightness and bonding with the matrix alloy as well as corrosion resistance to some extent

leading to the increase of wear resistance and hardness.