铝靶电流对磁控溅射AlSn20镀层耐蚀性的影响

郭巧琴; 蒋百灵; 李建平; 吴兵

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铝靶电流对磁控溅射AlSn20镀层耐蚀性的影响
Effects of Aluminum Target Current on the Corrosion Resistance of AlSn20 Coating Deposited by Magnetron Sputtering
2010年30卷第12期页码：1150-1152
纸质出版日期： 2010 ，
DOI：

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[1]郭巧琴,蒋百灵,李建平,吴兵.铝靶电流对磁控溅射AlSn20镀层耐蚀性的影响[J].特种铸造及有色合金,2010,30(12):1150-1152+1076.

Guo Qiaoqin1, Jiang Bailing1, Li Jianping2, et al. Effects of Aluminum Target Current on the Corrosion Resistance of AlSn20 Coating Deposited by Magnetron Sputtering[J]. Special Casting & Nonferrous Alloys, 2010,30(12):1150-1152.
[1]郭巧琴,蒋百灵,李建平,吴兵.铝靶电流对磁控溅射AlSn20镀层耐蚀性的影响[J].特种铸造及有色合金,2010,30(12):1150-1152+1076. DOI：

Guo Qiaoqin1, Jiang Bailing1, Li Jianping2, et al. Effects of Aluminum Target Current on the Corrosion Resistance of AlSn20 Coating Deposited by Magnetron Sputtering[J]. Special Casting & Nonferrous Alloys, 2010,30(12):1150-1152. DOI：

摘要

采用非平衡磁控溅射镀膜设备通过改变铝靶电流在铝基轴承合金表面制备了AlSn20镀层。并对镀层的交流阻抗谱和塔菲尔曲线进行了电化学研究

定量分析了镀层的耐蚀性

并用失重法进行了进一步验证。利用SEM研究了镀层表面微观结构。结果表明

铝靶电流为1.5A时

轴承合金磁控溅射AlSn20镀层使合金的电化学阻抗提高5～6个数量级

可将镀层的自腐蚀电位提高到-1.12V

改善轴承合金的耐蚀性。铝靶电流是影响AlSn20镀层耐蚀性的一个重要因素

铝靶电流越小

其耐蚀性越好。

Abstract

AlSn20 coating was prepared on bearing alloy by non-equilibrium magnetron sputtering changing aluminum target current

and corrosion resistance of the prepared coating was quantitatively analyzed by impedance spectroscopy and the Tafel polarization curves

which was validated by agravity. Microstructure of coating surface was observed by SEM （scanning electron microscope）. The results reveal that

with 1.5A aluminum target current

AlSn20 coating can greatly improve the corrosion resistance of bearing alloy as a result of increasing electrochemical impedance to about 5 to 6 order of magnitude and self-corrosion potential to-1.12V. Corrosion resistance of AlSn20 coating is closely related to aluminum target current. With decreasing in aluminum target current

corrosion resistance of coating is improved increasingly.