The cast polysilicon silicon rods were corroded with KOH solutions and oxidized with H

2

O

2

solutions.The effects of KOH solution concentrations and silicon temperatures on the corrosion of the silicon rods were investigated.The effect of the temperature of 30% H

2

O

2

solution on the oxidization of the as-corroded silicon rods was also investigated.The cutting performance of the as-fabricated silicon rods was analyzed.The optimal etched silicon rods were obtained after the corrosion with 20% KOH solution for 2 min at 65 ℃.The highest oxidation degree was obtained by soaking the silicon rod in 30% H

2

O

2

solution at 55℃for 8 min.The ratio of edge chipping of the polycrystalline silicon is decreased by 87% fabricated with diamond wire slicers using the optimal corrosion and oxidation treatment.