Diamond-like carbon films were prepared on three different substrates

such as stainless steel

aluminium alloy and silicon nitride

by plasma enhanced chemical vapor deposition（PECVD）using tetramethylsilane as the reaction source

and the performance of the films was evaluated.The surface morphology and structure of the films prepared were analyzed by atomic force microscopy（AFM）and Raman spectroscopy（Raman）

respectively.The hardness and elastic modulus of the films were measured by nanoindentation technique.The mechanical properties of the films were measured by friction and wear tester.The results of AFM characterization show that the deposited films present amorphous structure.Raman spectroscopy analysis shows that the deposited films belong to diamond-like films.DLC films can be prepared on non-metallic substrates by plasma chemical vapor deposition technology.DLC films on three substrates have compact structure

smooth surface and good uniformity.Compared with those of ones on aluminium alloy and silicon nitride

the hardness and elasticity modulus of the film on stainless steel as the substrate are less different from that of the substrate

and the stronger adhesion between the film and the substrate can be observed

reaching 13.55 N.The friction coefficient of the film with silicon nitride as the substrate is 0.094 8

however the adhesion of the film with silicon nitride as the substrate is poor

only 6.63 N.In addition

under the same experimental conditions

the composition and wear resistance of the films can be affected significantly by the type of substrates

while the surface morphology and roughness of the films are affected slightly.