Removal of Aluminum Impurities from Silicon by Vacuum Directional Solidification

Zheng Damin; Wei Kuixian; Ma Wenhui; Dai Yongnian

doi:10.15980/j.tzzz.2015.04.003

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Removal of Aluminum Impurities from Silicon by Vacuum Directional Solidification
Vol. 35, Issue 4, Pages: 345-347(2015)
Published： 2015 ，
DOI： 10.15980/j.tzzz.2015.04.003

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[1]郑达敏,魏奎先,马文会,戴永年.真空定向凝固去除硅中杂质铝的研究[J].特种铸造及有色合金,2015,35(04):345-347.

Zheng Damin, Wei Kuixian, Ma Wenhui, et al. Removal of Aluminum Impurities from Silicon by Vacuum Directional Solidification. [J]. Special Casting & Nonferrous Alloys 35(4):345-347(2015)
[1]郑达敏,魏奎先,马文会,戴永年.真空定向凝固去除硅中杂质铝的研究[J].特种铸造及有色合金,2015,35(04):345-347. DOI： 10.15980/j.tzzz.2015.04.003.

Zheng Damin, Wei Kuixian, Ma Wenhui, et al. Removal of Aluminum Impurities from Silicon by Vacuum Directional Solidification. [J]. Special Casting & Nonferrous Alloys 35(4):345-347(2015) DOI： 10.15980/j.tzzz.2015.04.003.

摘要

Al是硅中的主要杂质元素之一

通过真空定向凝固去除硅中的Al

在工业化提纯多晶硅中得到广泛应用。采用纯度为99.98%、铝含量为1.54×10-6的硅为原料

在500kg铸锭炉内进行提纯试验。结果表明

杂质Al的去除效果明显

Al的含量最低可以降低到2.8×10-8

去除率达98.2%。通过对过程分析后发现

在采用铸锭炉进行提纯试验的过程中

杂质Al的去除主要是通过定向凝固提纯过程中的分凝与真空挥发共同作用完成的。

Abstract

Aluminum is one of the main impurity elements in silicon.The method of removing aluminum contained in silicon by vacuum directional solidification has been widely applied for industrial polycrystalline silicon purification.The purification experiment was conducted in a 500 kg ingot furnace used in industrial production with the raw material of silicon whose purity and aluminum content were 99.98%and 1.54×10-6

respectively.The experimental results demonstrate that the aluminum removal effect exhibits obvious

where the aluminum content can be reduced to a lowest value of 2.8×10-8

and a removal efficiency of 98.2% can be reached.After analyzing the process of aluminum removal

it is considered that in the process of purification experiment by employing ingot furnace

the removal of aluminum impurity is mainly completed under the co-action of dephlegmation mechanism in the process of directional solidification purification and vacuum volatilization mechanism