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厚金属薄膜生产过程中应力来源及表征方法研究现状
Research Status of Stress Sources and Characterization Methods of Thick Metal Film During Production Process
- 2026年46卷第5期 页码:641-649
收稿:2025-03-15,
修回:2025-05-06,
录用:2025-05-12,
纸质出版:2026-05-20
DOI: 10.15980/j.tzzz.T20250119
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